Foundry-compatible silicon-photonics MEMS optical switch 兼容晶圆厂工艺的硅光MEMS光开关
arXiv:2608.03146 · 2026-08-04T05:23:12Z
The authors demonstrate a C-band silicon-photonics MEMS switch made in a zero-change foundry-compatible flow with BEOL post-processing. It reports more than 30 dB extinction, under 1.5 dB insertion loss, and roughly 20 nW static power, a strong combination if endurance and array integration hold up. 作者展示了一种采用零改动、兼容晶圆厂流程并结合BEOL后处理的C波段硅光MEMS光开关。该器件报告超过30 dB消光比、低于1.5 dB插入损耗和约20 nW静态功耗;若耐久性和阵列集成表现可靠,这一组合颇具吸引力。